Seoul Optodevice buys Candela CS20 to optimize epitaxial production

Process Control and Yield Management Program KLA-Tencor announced that South Korea's Seoul Optodevice recently purchased its Candela CS20 platform, demonstrating the importance of defect detection in the MOCVD process. It is well known that defects in epitaxial wafer and substrate processes can affect yield and reliability, including defect pits, cracks, irregularities, and surface irregularities; while substrate defects include particles, scratches, and contamination.

According to KLA-Tencor, the Candela CS20 system is designed for the detection of transparent materials (GaN and sapphire) and provides simultaneous detection of surface reflection, topography, scattering and phase characteristics. With real-time grading, the automated inspection system provides evidence-based data for effective process control. It is explained that the Candela CS20 test results can help users optimize the epitaxial process and increase productivity.

Jeff Donnelly, vice president of KLA-Tencor's growth and emerging markets division, said the LED market is rising at a rate of 35% year-on-year. We make significant investments in certain products, plus our years of experience in process control. Better products make it meet the technology roadmap; help solve the LED manufacturing problems, such as manufacturing costs.

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